This project, led by Prof. Liu Dong from COSE, won the first prize of Zhejiang Provincial Sci & Tech Progress Award. The group present and achieve original innovative achievements such as high-resolution multimodal imaging detection technology, adaptive scanning and intelligent stitching strategies, efficient dark-field image storage scheme, and real-time defect detection algorithm. Serialized high-end equipments for micro/nano surface and sub-surface defect detection of large aperture optical components, developed by the group, have been successfully applied to the large scientific project of laser fusion in China and provided strong support for the improvement of advanced manufacturing technology and technical level evaluation of large aperture optical components utilized in the large scientific project. the achievements have been applied in Laser Fusion Research Center of CAEP, Hangzhou Leaper Technology Co., Ltd., Zhejiang Dahua Technology Co., Ltd., etc.